Brooks Instrument Mass Flow Controller, Model 5850E
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5850EM Series Metal Sealed Thermal Mass Flow Controller

Brand: Brooks Instrument
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5850EM Series metal sealed mass flow controllers measure and control high-pressure gas flows in ultra-clean environments with a proven stability built on the performance of the widely used 5850E & i Series MFCs.

Its metal sealed construction and electro-polished wetted surfaces ensure outstanding flow integrity and help improve overall process efficiency by eliminating the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
Features
  • Long-term zero stability of < 0.2% full scale per year
  • < 3 seconds settling time to command changes with negligible overshoot/undershoot
  • Wide flow range – from 3 sccm up to 30,000 slpm
  • High pressure rating - up to 1,500 psi
  • Optional enhanced process internal finish - 5µ inch Ra avg
  • Removable flow sensor
  • Insensitive to mounting attitude
  • Mechanically and electrically compatible with other mass flow controllers
  • TTL compatible "valve off" and purge function
Benefits
  • All-metal flow path enhances gas purity and reduces leaks
  • Proven long-term stability and accuracy across broad process and application range
  • Excellent return on investment due to reliable performance
  • Removable flow sensor eliminates need for continuous monitoring and readjustment of gas pressures
  • Easily installed and serviced with analog only input/outputs

Specifications

Brand

Approvals & Certifications

  • EMC
  • CE
  • EN 61326-1: 2006

Process Connection

  • 1/4" Tube VCR
  • Integrally Welded to Body: Standard 1/4" VCR® with 0.250" Bore; Optional 3/8" - 1/2" VCR

Repeatability

  • 0.25% of Rate

VCR / VCO Connection

  • 1/2” VCR
  • 1/2” VCO
  • 1/4” VCO
  • 1/4” VCR
  • 3/8” VCO
  • 3/8” VCR

Flow Range (Full Scale Capacity)

  • 5850EM: 3 to 30,000 sccm
  • 5851EM: 10 to 100 slpm Nitrogen

Surface Finish

  • Enhanced Process (5 Ra avg.) Internal Surface Finish (Optional)

Accuracy

  • 1% F.S. Including Linearity
  • 1.5% F.S. Including Linearity (>20 slpm)

Response Time

  • Normally Closed Valve:  < 3 sec

Analog Communication

  • 4-20 mA
  • 0-5 Vdc

Seal Material

  • Nickel 200

Wetted Material

  • Valve Seat: 316L, Viton® Fluoroelastomers, Buna-N, Kalrez® or Teflon®

Differential Pressure Range

  • 5 to 50 psi (Gas and Range Dependent)

Operating Pressure

  • Max 1,500 psi

Ambient Temperature

  • Operating: 40° to 150° F (5° to 65° C)
  • Non-Operating: -13° to 212° F (-25° to 100° C)
  • 5851EM: 41° to 149° F (5° to 65° C)

Electrical Connection

  • 15 Pin D Connector (DA-15P)

Power Supply/Consumption

  • Normally Open Valve: 10.5 Watts
  • Normally Closed Valve: 3.25 Watts

  • Fiber Optic
  • LED / MOCVD
  • Semiconductor
  • Solar

Documentation

Data Sheets

Product Manuals

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