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GF40 Series Elastomer Sealed Thermal Mass Flow Controller/Meter

Brand: Brooks Instrument
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Multiple gases in one device equals maximum process flexibility and productivity.

The GF40 Series elastomer sealed mass flow controllers and meters with Brooks Instrument’s exclusive MultiFlo™ technology provide the perfect choice for systems, processes and facilities that use a variety of gases, change gas types frequently or need to re-range while preserving gas measurement and control accuracy.

It enables a new level of process flexibility combined with unprecedented flow measurement and control performance.
Features
  • Programmable multi-gas/multi-range capabilities
  • Brooks® MultiFlo™ gas database contains thousands of native gas runs to establish correction functions
  • Sub-1 second flow response time and accuracy of 1% set point for demanding applications
  • Well suited for a variety of gases
  • Fast response, Hastelloy sensor
  • Easily accessible diagnostic service port is independent of tool communication
  • Multi-protocol communication options include DeviceNet™, EtherCAT®, Profibus® and RS-485 analog interface
Benefits
  • MultiFlo™ technology enables new gas calibrations and full-scale ranges without removing the MFC from the gas line, maximizing process uptime
  • MultiFlo™ programming is simple and user-friendly; new gas can be selected in under 60 seconds
  • OEMs and large end users can greatly reduce the number of gas and range-specific controllers they inventory
  • Excellent process gas accuracy backed by superior metrology systems and calibration based on global standards
  • Corrosion-resistant sensor provides unmatched long-term stability ensuring maximum yield and throughput
  • User-accessible service port simplifies troubleshooting and diagnostic tasks
  • Variety of elastomer seals provide cost performance flexibility across range of applications
  • Multi-protocol communication interface supports integration into existing systems

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Specifications

Brand

Flow Range (Full Scale Capacity)

  • 3 sccm to 50 slpm (N2 Eq.)

Flow Accuracy

  • ± 1% of SP 35-100%
  • ± 0.35% of FS 2-35%

Repeatability/Reproducibility

  • < ± 0.20% SP

Linearity

  • ±0.5% FS (Included in Accuracy)

Response Time

  • Normally Closed Valve: < 1 sec (within 2% for Steps 0-10 Through 0-100%)
  • Normally Open Valve < 3 sec (within 2% for Steps 0-10 Through 0-100%)

Control Range

  • 2 to 100%

Zero Stability

  • < ±0.5% FS Per Year

Temperature Range

  • 5° to 50° C (41° to 122° F)

Maximum Operating Pressure

  • 150 psig (10 bar)

Differential Pressure Range

  • 3 to 860 sccm (7 to 45 psid)
  • 861 to 7,200 sccm (15 to 45 psid)
  • 7,201 to 50,000 sccm (25 to 45 psid)

Wetted Material

  • 316 Stainless Steel
  • Hastelloy C-22
  • 1707 PH
  • 430 SS

Seal Material

  • Viton, Buna, Kalrez, EPDM or Neoprene

Surface Finish

  • 32µ inch Ra

Valve Options

  • Normally Closed
  • Normally Open
  • Meter (No Valve)

Communication

  • DeviceNet, EtherCAT®, Profibus®, RS485

Power Supply/Comsumption

  • Analog / RS-485: 12-24 Vdc, 7 Watt/8 Watt
  • DeviceNet™: 11-25 Vdc, 7 Watt/8 Watt
  • EtherCAT® / Profibus®:  13.5-27 Vdc, 7 Watt/8 Watt

Certifications & Approvals

  • CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE Testing) Safety EN61010-1
  • RoHS Directive (2011/65/EU)
  • REACH Directive EC 1907/2006

  • Solar Cell Chemical Vapor Deposition Systems
  • Life Sciences Bioreactors 
  • Vacuum Processes
  • Nanotechnology/MEMS Fabrication
  • Plasma, Glass and Web Coating Systems
  • Excellent Option for Manifold/Gas Delivery Systems

Documentation

Data Sheets

Product Manuals

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