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GF135 Digital Mass Flow Controller
Brand: Brooks InstrumentThe Brooks GF135, with integral real-time ROD flow error detection, drops into the standard ultra high purity surface mount or VCR MFC footprint providing an easy path to upgrade critical gas lines on existing systems.
With the GF135, the user will be able to take advantage of enhanced process gas accuracy, market leading pressure transient performance and MFC health indicators such as automatic trending of sensor stability and valve shutdown (leak-by).
Using these health indicators and user programmable alarm limits, via MFC service port or remote digital commands, the user can establish limits to improve the yield and/or manage maintenance schedules to maximize uptime.
Features- Real-time flow error detection
- Sensor stability tracking
- Valve leak-by tracking
- Enhanced process gas accuracy
- Market leading ultra-fast flow settling time
- Enhanced pressure insensitivity
- Corrosion resistant Hastelloy® sensor
- Drop-in upgrade for surface-mount and VCR MFCs
Benefits
- Support yield improvement programs by capturing wafer impacting flow deviations
- Improves system uptime by supporting predictive maintenance
- Allows user to monitor and set limits to minimze first wafer effects
- Meet process gas chemistry control challenges at 10 nm
- Optimize wafer process cycle time by reducing non-productive flow stabilizaton steps. Supports advanced 3D device processing
- Superior process gas control for enhanced etch and deposition control
- Provides unmatched long-term sensor stability ensuring maximum yield and throughput
- Easy upgrade for critical gas lines on existing systems
Specifications
Brand
Accuracy
- 1% S.P. plus & 0.04% F.S. (2-10% F.S.)
- ± 1% S. P. (10-100 % of F. S.)
Repeatability/Reproducibility
- < 0.15% of Set Point
Differential Pressure Range
- 3-860 SCCM - psid: 7 to 45 (kPa: 48.26 to 310.3, bar: 0.48 to 3.10)
- 861-5,000 SCCM - psid: 10 to 45 (kPa: 68.95 to 310.3, bar: 0.68 to 3.10)
Operating Pressure
- Pneumatic Valve - psi: 43.5 to 72.5 (kPa: 300 to 500, bar: 3 to 5)
- psi: 100 (kPa: 689.5, bar: 7) Max.
Operating Temperature
- 10° to 50° C (50° to 122° F)
Stability
- < ± 0.5% of Full Scale Per Year
Viewing Distance
- Fixed/10 feet (3.04 metres)
Control Range
- 1 to 100%
Temperature Coefficient
- Span: 0.05% of Set Point/°C
- Zero: 0.005% of Full Scale/°C
Power Supply
- DeviceNet: ± 24 Vdc (± 10 %)/250 mA Max
- Analog / RS-485: ± 15 Vdc (+10 %), 6 W, Max. or 24 Vdc ± 10%
- DeviceNet: 11-25 Vdc/545 mA Max @ 11 Vdc
Wetted Materials
- 304 Stainless Steel
- 316L Stainless Steel
- Hastelloy C-22
- SEMI F20 UHP Compliant 316L VIM/VAR
- Stainless Steel (KM-45)
Valve Type
- Normally Closed
Flow Rate (Full Scale)
- 3 SCCM to 5 SLM (N₂ Equivalent)
Display
- Top Mount Electronically Rotatable Integrated LCD Display
Sensitivity
- Pressure Sensitivity: ± 0.04% of Full Scale/psi
- Temperature Sensitivity: ± 0.04% of Set Point/°C
Communication
- DeviceNet
- RS-485
Electrical Connectors
- Analog / RS-485 Via 9-Pin D-Connector
- DeviceNet Via 5-Pin M12 Connector
Approvals & Certifications
- CE EN 61326: 2006
- EMC Directive 2004/108/EC
- FCC Part 15 & Canada IC - Subset of CE Testing
- ISO 9001
- REACH Directive EC 1907/2006
- RoHS Directive 2011/65/2006
Settling Time (To within ± 2% of Full Scale)
- < 400 milliseconds (861-5,000 SCCM N₂ Equivalent)
- < 300 milliseconds (< 860 SCCM N₂ Equivalent)
VCR / VCO Connection
- 1/4” VCR
- 1-1/2” VCR
- Etch Process
