4800 Series Elastomer Sealed Thermal Mass Flow Controllers & Meters

Brand: Brooks Instrument

The faster your thermal mass flow controllers and meters respond, the more efficient and productive your processes can be. 

That’s the key advantage of the 4800 Series controllers and meters: An advanced MEMS-based thermal sensor, combined with a proprietary PID algorithm to optimize control valve response, makes it possible for select 4800 Series controllers to quickly match actual mass flow to any changes in set point.

The optional Local Operator Interface (LOI) provides a convenient user interface to view, control, and configure the devices, eliminating the need for remote secondary electronics.
  • Flow response time (settling time) < 0.75 seconds
  • Innovative MEMS sensor and proprietary PID algorithm
  • Compact size is less than half the size of typical thermal MFCs: 1” x 3” x 4” (25 mm x 76 mm x 101 mm)
  • Optional Local Operator Interface (LOI) simplifies set-up and operation; free LabVIEW VI download for monitoring and zeroing the device
  • Digital capability via RS-232
  • Well-suited for wide range of common, non-corrosive gases
  • Fast response time ensures rapid steps during process recipe changes
  • Excellent for OEMs: Compact size eases integration into tight machine spaces and speeds installation
  • Optional Local Operator Interface (LOI) is a turnkey solution for local indication, set point control and device configuration; eliminates need for remote secondary electronics
  • Variety of communication options makes it easy to align with user requirements


Process Connection

  • Inlet/Outlet: 9/16”-18 UNF Threads

Approvals & Certifications

  • RoHS
  • CSA
  • ATEX
  • EMC
  • EU Directive 2011/65/EU
  • UL

Operating Temperature

  • 5° to 50° C (41° to 22° F)


  • 5 to 95% R.H. (Ambient)


  • Max. 10 barg (150 psig)

Electrical Connection

  • Two 15-pin D-sub Connectors

Power Supply

  • +15 Vdc + 10% or +24 Vdc + 10%

Power Requirement

  • 15 Vdc, 130 mA/30 mA, 160 mA/60 mA Max.
  • 24 Vdc, 150 mA/30 mA, 200 mA/60 mA Max.


  • Analog: 0-5 Vdc or 4-20 mA
  • Digital: RS-232 (Standard with All Analog I/O Options)

Differential Pressure Range

  • 0.35 to 10 bar (5 to 150 psid) (Controllers)

Control Range

  • 2 to 100%


  • Flow: ± 3.0% of FS, ± 1.0% FS Optional


  • Flow: ± 0.15% of FS

Wetted Material

  • Stainless Steel, Fluoroelastomers, Silicon-based Sensor

  • Heat treating, cutting, welding and other thermal processes
  • Solar/thin film physical vapor deposition (PVD) systems
  • Analytical devices to measure and control reagent, calibration and sample gas flows
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