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METAL SealED Flow/Pressure Meter & Controller
Brand: BronkhorstSince 1989 Bronkhorst manufactures metal sealed Mass Flow and Pressure Meters/Controllers, designed especially to meet the requirements of the semicon market as well as other high purity gas applications.
The instruments feature high surface quality and are of modular construction with metal-to-metal seals that ensure long-term leak tightness. Metal sealed Mass Flow Meters/ Controllers can be supplied in ranges starting from 0.12-6 sccm up to 1-50 slm (based on N2) or even higher on request.
Metal sealed Pressure Meters/Controllers are available in pressure ranges from psi: 0.03 to 1.43 (kPa: 0.1999 to 9.86, bar: 0.002 to 0.09) up to psi: 18 to 900 (kPa: 124.1 to 6,205, bar: 1.241 to 62.05).
Features- Patented metal-to-metal seal construction ensures long-term leak tightness (to atmosphere)
- Electropolished wetted parts
- Fast response, excellent repeatability
- Flow ranges from 0.12-6 sccm up to 1-50 slm n2-equivalent (higher on request)
- Multi gas / multi range functionality
- Optional solutions for low pressure drop or vacuum applications
- Pressure ranges from psi: 0.03 to 1.43 (kPa: 0.1999 to 9.86, bar: 0.002 to 0.09) up to psi: 18 to 900 (kPa: 124.1 to 6,205, bar: 1.241 to 62.05)
- Optional surface mount constructions
- Compliant with RoHS directives
Specifications
Brand
Applications
- Hazardous Areas
- Semiconductor Industry
Approvals & Certifications
- BV
- RoHS
Environmental Protection
- IP40
Tube Connection
- 1/4” Tube
