Brooks Instrument Pressure Controller / Flow Meter, Model 5866RT
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Model 5866RT Elastomer Sealed Pressure Controller/Flow Meter

Brand: Brooks Instrument
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The Brooks model 5866RT metal or elastomer sealed pressure controller and flow meter controls pressure while also measuring flow rate.

Model 5866RT receives a remote pressure transducer signal, and using adjustable integral PID control electronics and control valve, will maintain a desired set pressure.

With options in seals, electro-polished wetted surfaces and a wide pressure and flow measurement range, 5866RT delivers proven results across a broad range of processes.
Features
  • Integral pressure transducer
  • Response time: < 0.8 seconds
  • Wide flow measurement range with full-scale flow rates from 0 - 3 sccm to 0 – 30,000 sccm
  • Wide range of full scale pressures (Max pressure 1,500 psig)
  • Optional metal seal available
  • Electro-polished wetted surfaces (optional)
  • Electrically activated valve override
  • Suitable for upstream or downstream control
  • Analog interface
Benefits
  • Eliminates droop, hysteresis and boost
  • High leak integrity
  • More control over pressure and flow
  • Dynamic tuning adjustments with top mounted DIP switches

Specifications

Brand

Flow Range (Full Scale Capacity)

  • 0 - 3 sccm to 0 - 30,000 sccm N2 Eq.

Accuracy

  • ±1% F.S. Including Linearity at the Calibration Conditions
  • ±1.5% F.S. for Flow Rates Greater Than 20 slm

Repeatability

  • ±0.25% of Rate

Valve Type

  • Normally Closed
  • Normally Open
  • No Valve (Elastomer, Upstream Configuration Only)

Approvals & Certifications

  • CE
  • EMC Directive 89/336/EEC EN 61326-1
  • PED 97/23/EC

Process Connection

  • 1/8” or 1/4”  Compression Fittings
  • 1/4” VCO Male
  • 1/4” VCR Male

Pressure Control Range

  • 100:1 for A Remote Transducer with a 0-10 V Output

Pressure

  • Max 1,500 psig

Temperature Range

  • 0° to 65° C

Seal Material

  • Elastomer or Metal

Wetted Material

  • Standard 316L/316L VAR Stainless Steel
  • Valve Seat: Standard Viton® Fluoroelastomers or Metal
  • External/Internal Seals: Flouroelastomers or Metal
  • Optional: Buna-N, Teflon® or Kalrez®

Analog Communication

  • 0-5 V

Electrical Connection

  • 15-Pin "D" Connector

Power Supply/Consumption

  • Normally Closed: 3.5 watts; +15 Vdc (±5%) @ 35 mA, -15 Vdc (±5%) @ 180 mA
  • Normally Open: 10.5 watts; ±15 Vdc (±5%) @ 350 mA

  • Thin-film Processes
  • Chemical Research
  • Petrochemical Research
  • Laboratory
  • Fuel Cell
  • Life Science

Documentation

Data Sheets

Product Manuals

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