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MC–Series Gas Mass Flow Controller
Brand: Alicat ScientificMC-Series Gas Mass Flow Controllers rapidly reach setpoints and maintain stable control of mass flow, volumetric flow, or pressure for 98+ gases across a very wide flow range – 0.01% to 100% of full scale. Highly customizable for easy integration.
Devices are custom ranged from 0.5 SCCM full scale to 5,000 SLPM full scale.
Features- Multi-variable process measurements: Simultaneously measure mass flow, volumetric flow, gas pressure, and gas temperature
- User changeable units of measurement: Change the unit of measurement for pressure, flow, or temperature from our extensive list of engineering units
- Gas Select: Select your process gas from any of the 98+ preloaded NIST-traceable gas calibrations in our gas list
- Composer™: Define 20 custom gas mixtures of up to 5 constituent gases using our Composer™ firmware
- Monochrome backlit LCD with integrated touchpad: Easily read measurements using the backlit display and control configurations with the user-friendly integrated touchpad
- User adjustable setpoint ramping & limits: Configurable ramp rates allow the process variable to be controlled as fast or as slow as desired, and configurable setpoint limits protect processes from inadvertent setpoint changes
- User adjustable standard temperature and pressure (STP) conditions: Quickly change reference conditions without need for recalibration
- Valve close override and valve open override: Utilize alarms to quickly vent your system or stop all flow as needed
Specifications
Brand
STP Reference Condition
- 25° C & 1 atm
NTP Reference Condition
- 0° C & 1 atm
Display
- Monochrome LCD or Color TFT Display with Integrated Touchpad
Environmental Protection
- IP40
Humidity
- 0 to 95 % Non-Condensing
Wetted Material
- 302, 303, 304, 316L & 430FR Stainless Steel
- FKM
- Alumina Ceramic
- Brass
- Glass
- Gold
- Heat-cured Epoxy
- Heat-cured Silicone Rubber,
- Polyamide
- Silicon
Operating Pressure
- 11.5 to 175 psia Common Mode Pressure
- 11.5 to 75 psia Differential Pressure
Communication
- RS-485 Serial
- Modbus RTU (Over RS-232 or RS-485)
- Modbus TCP/IP
- DeviceNet
- EtherCAT
- EtherNet/IP
- Profibus
Power Requirement
- 12-24 Vdc, 250 mA (290 mA If Equipped with 4-20 mA Output)
Mass Flow Accuracy
- 10 sccm Full Scale Through 20 slpm: ± 0.6 % of Reading & ± 0.1 % of Full Scale at Calibration Conditions, High Accuracy Option - ± 0.5 % of Reading or ± 0.1 % of Full Scale, whichever is greater
- 0.5 to 5 sccm Full Scale & 5 to 5000: ± 0.6 % of Reading & ± 0.1 % of Full Scale at Calibration Conditions, High Accuracy Option - ± 0.5 % of Reading or ± 0.1 % of Full Scale
Repeatability (2σ)
- 0.5 to 5 sccm Full Scale & 50 to 5000 slpm Full Scale: ± (0.2 % of Reading + 0.02 % of Full Scale)
- 10 to 20 sccm Full Scale: ± (0.1 % of Reading + 0.02 % of Full Scale)
Accuracy
- Temperature: ± 0.75° C
- Pressure: ± 0.5 % of Reading
- Analog Signal: ± 0.1 % of Full Scale Additional Uncertainty
Operating Temperature
- -10° to 60° C
Response Time
- Sensor: < 1 ms
- Typical Indication: < 10 ms, Flow Rate Dependent
Operating Pressure Full Scale
- 160 psia
Analog I/O
- 4-20 mA, 0-5 Vdc, 1-5 Vdc, 0-10 Vdc
Totalizer Volume Uncertainty
- ± 0.5 % of Reading in Additional Uncertainty
Steady State Control Range
- 0.01 to 100 % of Full Scale
Typical Control Response Time
- 30 ms or 100 ms
Valve Function
- Normally Closed
