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GF81 Digital Mass Flow Controller/Meter
Brand: Brooks InstrumentThe Brooks GF81 Series features a corrosion-resistant Hastelloy C-22 sensor for durable, long-term operation.
Sub-1 second settling times and 1% of set point accuracy ensure that the GF81 will provide reliable flow measurement or flow control in demanding gas flow applications.
GF81 achieve excellent internal to external leak integrity for challenging process gases as found in CVD, solar, and other processes.
With a wide range of digital and analog I/O options available, the GF81 represents an extremely powerful, yet easy, upgrade for existing MFCs or MFMs.
Features- Metal seal
- Adaptable mechanical configurations
- Metrology
- MultiFlo gas and range programmabilty with advanced diagnostics and user accessible service port
- Corrosion resistant Hastelloy® sensor
Specifications
Brand
Approvals & Certifications
- CE EN 6126: 2006
- FCC Part 15 & Canada IC - Subset of CE Testing
- RoHS
Full Scale Flow Range
- 51 to 300 slm
Flow Accuracy
- 1% S.P. 35-100%
- 0.35% F.S. 5-35%
Repeatability/Reproducibility
- 0.15% S.P.
Linearity
- ± 0.5% F.S. (Included in Accuracy)
Response Time (Settling Time)
- < 1 second
Control Range
- 5% to 100%
Zero Stability
- < ± 0.5% F.S. Per Year
Operating Temperature
- 5° to 50° C (41° to 122° F)
Operating Pressure
- Controller: Max 75 psig (5 bar)
- Meter: Max 150 psig (10 bar)
Differential Pressure Range
- 30 - 90 psid
Valve Type
- Normally Closed, Meter
Wetted Material
- 316 Stainless Steel
- Hastelloy C-22
- KM45
Internal Seals/Valve Seat/External Seal
- 316 Stainless Steel
