Bronkhorst Surface Mount System, FLOW-SMS
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FLOW-SMS

Series: FLOW-SMS Surface Mount System Brand: Bronkhorst

Mass Flow Meters (MFM), Ranges Based on N2

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  • Base Model - Mass Flowmeters (MFM)
  • Mass Flow Meters (MFM) - Minimum mlₙ/min: 0.06 to 3 / Maximum mlₙ/min: 0.18 to 9

Specifications

Brand

Accuracy

  • ± (0.5 % of Reading + 0.1 % of Full Scale) - Mass Flow
  • ± 0.5 % of Full Scale - Pressure

Applications

  • Biotechnology & Chemical Installations
  • Burner Control (Welding)
  • Food & Beverage
  • Semiconductors
  • Solar Cell Fabrication
  • Vacuum, Plasma, Sputter & Coating Processes

Approvals & Certifications

  • ISO 9001, 14001

Communication

  • DeviceNet
  • FLOW-BUS
  • Modbus
  • PROFIBUS DP: Add 50 mA
  • PROFINET
  • RS-232

Consumption

  • 3 W Solenoid Operated
  • Controller: 320 mA - Max.
  • Meter: 70 mA

Electrical Connectors

  • Analog / RS-232 / PROFIBUS DP Power: 9-Pin D-Connector Male
  • DeviceNet: 5-Pin M12 Male
  • Modbus / EtherCAT / FLOW-BUS / PROFINET: RJ45 Modular Jack
  • PROFIBUS DP Bus: 9-Pin D-Connector Female

Environmental Protection

  • IP40 (Ingress Protection)

Flow Rate

  • Mass Flow Controllers (MFC), Mass Flowmeters (MFM): 0.06-3 mlₙ/min to 1-50 Lₙ/min

Load Impedance

  • Analog Set Point: 0(4)-20 mA ~250 kΩ, max.
  • Analog Set Point: 0-(5)10 Vdc > 100 kΩ min.

Measuring Time

  • Settling Time: 1 to 2 seconds Above 5 % of Full Scale

Mounting Position

  • Any Orientation

Operating Pressure

  • psig: 145 (kPa: 1,000, bar: 10)

Operating Temperature

  • -10° to 50° C (14° to 122° F)

Output

  • 0-10 Vdc, Load Impedance > 2 kΩ min.
  • 0-20 mA, Load Impedance 2 kΩ min.
  • 4-20 mA, Load Impedance < 375 ohms, Max.

Power Supply

  • 15-24 Vdc

Pressure Range

  • Electronic Pressure Controllers (EPC): 5-100 Mbar to 0.5-10 bar
  • Electronic Pressure Transducers (EPT): 2-100 Mbar to 0.2-10 bar

Repeatability

  • < 0.1 % of Full Scale
  • < 0.2 % of Reading

Response Time

  • Response Time Sensor: < 0.1 second

Seat / Seal Material

  • EPDM
  • Kalrez (FFKM)
  • Viton

Sensitivity

  • 0.01 % of Reading/bar H₂ - Mass Flow
  • 0.1 % of Full Scale/°C
  • N2: 0.1 % of Reading/bar - Mass Flow
  • Span: < 0.05 % of Reading/°C - Mass Flow
  • Zero: < 0.05 % of Full Scale/°C - Mass Flow

Stability

  • Control: < ± 0.1 % of Full Scale

Supply Voltage

  • 24 Vdc Solenoid Operated

Turndown

  • 1:50 for Mass Flow Measurement / Control Modules

Update Time

  • Warm-Up: 2 minutes for Accuracy ± 2 % of Full Scale
  • Warm-Up: 30 minutes

Wetted Materials

  • 316L Stainless Steel

Documentation

Data Sheets

View Product Series

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